Clean room area

Item

Maintenance

Fab Total：
1,100坪

Class-100 Total：：
497坪


VLF : vertical laminar flow

HEPA: high-efficiency particulate attenuation

Library board: PU library board

Check or update annually

It is more accurate to judge by the measured value, Ex: differential pressure, air volume, filter material breaking Damage situation, etc.

Environment temperature : 23±1℃

Environment humidity：45±3％

Fed-Std-209E
Class name

Class Limits

0.1μm

0.2μm

0.3μm

0.5μm

5μm

Volume units

Volume units

Volume units

Volume units

Volume units

SI

English

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

M1.5

1

1240

35

265

7.5

106

3

35.3

1

-

-

M2.5

10

12,400

350

2,650

75

1,060

30

353

10

-

-

M3.5

100

-

-

26,500

750

10,600

300

3,530

100

-

-

M4.5

1,0000

-

-

-

-

-

-

35,300

1,000

247

7

M5.5

10,000

-

-

-

-

-

-

353,000

10,000

2,470

70

M6.5

100,000

-

-

-

-

-

-

3,530,000

100,000

24,700

700

ISO 14644：Maximum concertration limits (particle/m3 of air) particle equal to and larger than the considered sizes shown below

Classification
Numbers(N)

0.1μm

0.2μm

0.3μm

0.5μm

1μm

5.0μm

ISO Class 1

10

2

-

-

-

-

ISO Class 2

100

24

10

4

-

-

ISO Class 3

1,000

237

102

35

8

-

ISO Class 4

10,000

2,370

1,020

352

32

-

ISO Class 5

100,000

23,700

10,200

3,520

832

29

ISO Class 6

1,000,000

237,000

102,000

35,200

8,320

293

ISO Class 7

-

-

-

352,000

83,200

2,930

ISO Class 8

-

-

-

3,520,000

832,000

29,300

ISO Class 9

-

-

-

35,200,000

8,320,000

293,000

Explanation and comparison of various ways of clean room FFU system architecture

Item

Turbulent flow

Horizontal laminar flow

Vertical laminar flow

Clean tunnel method

Clean pipe method

Spot cleaning

Cleanliness

1,000~100,000

10~1,000

1~100

1~100

1~100

100~1,000

Number of ventilation

(Times/hour)

20~70

100~300

300~500

300~500

100~400

100~300

Air speed
(m/s)

0.1~0.3

0.25~0.5

0.25~0.45

0.3~0.5

0.35~0.5

0.25~0.45

Pressure difference(mmH2O)

0.5~1.0

1.0~2.0

1.0~2.5

0.5~1.0

1.0~2.5

0.5~1.5

Construction cost

Small

Large

Largest

Large

Medium

Smallest

Maintenance costs

Small

Large

Largest

Large

Small

Smallest

Upgrade capability

Hard

Easy

Hard

Easy

Hard

Harder

Maintenance difficult

Medium

Medium

Easy

Easy

Hard

Medium

Noise level

Small

Large

Largest

Large

Medium

Medium